JPH0474306B2 - - Google Patents

Info

Publication number
JPH0474306B2
JPH0474306B2 JP58182093A JP18209383A JPH0474306B2 JP H0474306 B2 JPH0474306 B2 JP H0474306B2 JP 58182093 A JP58182093 A JP 58182093A JP 18209383 A JP18209383 A JP 18209383A JP H0474306 B2 JPH0474306 B2 JP H0474306B2
Authority
JP
Japan
Prior art keywords
titanium
nitride
copper
ceramic sintered
sintered body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58182093A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6077178A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58182093A priority Critical patent/JPS6077178A/ja
Priority to EP84111292A priority patent/EP0142673B1/en
Priority to DE8484111292T priority patent/DE3485434D1/de
Publication of JPS6077178A publication Critical patent/JPS6077178A/ja
Priority to US07/726,714 priority patent/US5125557A/en
Publication of JPH0474306B2 publication Critical patent/JPH0474306B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/368—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C04B2237/592—Aspects relating to the structure of the interlayer whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
JP58182093A 1983-09-30 1983-09-30 窒化物セラミックス接合体およびその製造方法 Granted JPS6077178A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58182093A JPS6077178A (ja) 1983-09-30 1983-09-30 窒化物セラミックス接合体およびその製造方法
EP84111292A EP0142673B1 (en) 1983-09-30 1984-09-21 Ceramic composite body and production thereof
DE8484111292T DE3485434D1 (de) 1983-09-30 1984-09-21 Keramischer verbundkoerper und seine herstellung.
US07/726,714 US5125557A (en) 1983-09-30 1991-07-01 Ceramics bonded product and method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58182093A JPS6077178A (ja) 1983-09-30 1983-09-30 窒化物セラミックス接合体およびその製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP25288693A Division JPH0710645A (ja) 1993-10-08 1993-10-08 窒化アルミニウム接合体およびその製造方法
JP12350994A Division JPH07101784A (ja) 1994-06-06 1994-06-06 窒化アルミニウム接合体およびその製造方法

Publications (2)

Publication Number Publication Date
JPS6077178A JPS6077178A (ja) 1985-05-01
JPH0474306B2 true JPH0474306B2 (en]) 1992-11-25

Family

ID=16112226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58182093A Granted JPS6077178A (ja) 1983-09-30 1983-09-30 窒化物セラミックス接合体およびその製造方法

Country Status (4)

Country Link
US (1) US5125557A (en])
EP (1) EP0142673B1 (en])
JP (1) JPS6077178A (en])
DE (1) DE3485434D1 (en])

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0208842A3 (de) * 1985-06-12 1988-07-20 Kernforschungszentrum Karlsruhe Gmbh Verfahren zum Herstellen einer festen Bindung zweier Teile
EP0221262B1 (de) * 1985-08-14 1988-11-02 Buchtal Gesellschaft mit beschränkter Haftung Grossformatige keramische Platte mit auf ihrer der Sichtseite abgewendeten Seite vorgesehenen Halterungselementen
FR2599896B1 (fr) * 1986-06-06 1988-10-21 Comp Generale Electricite Procede pour solidariser par thermocompression un tube en alumine beta ou beta seconde et un support en ceramique isolante dans un generateur electrochimique sodium-soufre et generateurs electrochimiques en faisant application
JPH0680873B2 (ja) * 1986-07-11 1994-10-12 株式会社東芝 回路基板
JPH0739236Y2 (ja) * 1986-10-30 1995-09-06 日本特殊陶業株式会社 アルミナ質基板と窒化アルミニウム基板の接合部
US5248079A (en) * 1988-11-29 1993-09-28 Li Chou H Ceramic bonding method
US6413589B1 (en) 1988-11-29 2002-07-02 Chou H. Li Ceramic coating method
JPH0710645A (ja) * 1993-10-08 1995-01-13 Toshiba Corp 窒化アルミニウム接合体およびその製造方法
AT400909B (de) * 1994-01-17 1996-04-25 Plansee Ag Verfahren zur herstellung einer kühleinrichtung
JPH07101784A (ja) * 1994-06-06 1995-04-18 Toshiba Corp 窒化アルミニウム接合体およびその製造方法
US6286206B1 (en) 1997-02-25 2001-09-11 Chou H. Li Heat-resistant electronic systems and circuit boards
US5937514A (en) 1997-02-25 1999-08-17 Li; Chou H. Method of making a heat-resistant system
US6976904B2 (en) * 1998-07-09 2005-12-20 Li Family Holdings, Ltd. Chemical mechanical polishing slurry
US6676492B2 (en) 1998-12-15 2004-01-13 Chou H. Li Chemical mechanical polishing
US6458017B1 (en) 1998-12-15 2002-10-01 Chou H. Li Planarizing method
US6586704B1 (en) 2001-05-15 2003-07-01 The United States Of America As Represented By The United States Department Of Energy Joining of materials using laser heating
JP4077181B2 (ja) * 2001-09-27 2008-04-16 本田技研工業株式会社 金属用又はセラミック用接合材及び金属又はセラミックの接合方法
US20050097893A1 (en) * 2003-11-07 2005-05-12 General Electric Company Method and apparatus for increasing a durability of a body
US7028462B2 (en) * 2003-11-07 2006-04-18 General Electric Company Method and apparatus for arresting a crack within a body
FR2872072B1 (fr) * 2004-06-24 2006-09-29 Snecma Propulsion Solide Sa Procede de brasage de pieces en materiau composite thermostructural siliciure
DE102004044942A1 (de) * 2004-09-16 2006-03-30 Esk Ceramics Gmbh & Co. Kg Verfahren zum verformungsarmen Diffusionsschweißen von keramischen Komponenten
US7857194B2 (en) * 2007-05-01 2010-12-28 University Of Dayton Method of joining metals to ceramic matrix composites
JP4471002B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471003B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
JP4471004B2 (ja) * 2008-01-23 2010-06-02 セイコーエプソン株式会社 接合体の形成方法
DE102009008926B4 (de) * 2009-02-13 2022-06-15 Danfoss Silicon Power Gmbh Verfahren zur Schaffung einer hochtemperatur- und temperaturwechselfesten Verbindung eines Halbleiterbausteins mit einem Verbindungspartner und einer Kontaktlasche unter Verwendung eines temperaturbeaufschlagenden Verfahrens
US10406774B2 (en) 2016-10-17 2019-09-10 U.S. Department Of Energy Diffusion bonding of silicon carbide using iridium and hermetic silicon carbide-iridium bonds
CN114956850B (zh) * 2022-04-14 2023-05-02 天诺光电材料股份有限公司 一种利用金属线纳米薄膜制备覆铜氮化物陶瓷板的方法
JP2024136337A (ja) * 2023-03-24 2024-10-04 株式会社東芝 積層体の搬送方法およびそれを用いた接合体の製造方法並びにセラミックス回路基板の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2857663A (en) * 1954-02-09 1958-10-28 Gen Electric Metallic bond
DE1646934A1 (de) * 1965-07-23 1971-08-05 Rosenthal Ag Verfahren zur Herstellung festhaftender Metallschichten auf Keramikflaechen
DE2543140C3 (de) * 1975-09-26 1978-05-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen vonlesten Lötverbindungen zwischen Teilen aus keramischen hochtemperaturbeständigen Werkstoffen und hochschmelzenden Metallen
JPS54149646U (en]) * 1978-04-11 1979-10-18
US4226932A (en) * 1979-07-05 1980-10-07 Gte Automatic Electric Laboratories Incorporated Titanium nitride as one layer of a multi-layered coating intended to be etched
US4357382A (en) * 1980-11-06 1982-11-02 Fansteel Inc. Coated cemented carbide bodies
US4448853A (en) * 1981-04-15 1984-05-15 Bbc Brown, Boveri & Company, Limited Layered active brazing material and method for producing it
JPS5879880A (ja) * 1981-11-02 1983-05-13 大同特殊鋼株式会社 接合方法
JPS5891087A (ja) * 1981-11-26 1983-05-30 旭硝子株式会社 セラミツクス部材と金属部材の接合体
JPS5891088A (ja) * 1981-11-27 1983-05-30 トヨタ自動車株式会社 セラミツクと金属との接合方法
JPS58120578A (ja) * 1982-01-05 1983-07-18 松下電器産業株式会社 無機質基材の選択性鑞付け方法
JPS58140381A (ja) * 1982-02-12 1983-08-20 日本特殊陶業株式会社 窒化珪素焼結体表面の金属化法
JPS5957973A (ja) * 1982-09-25 1984-04-03 日本特殊陶業株式会社 金属・セラミツクス複合体
JPS59137373A (ja) * 1983-01-20 1984-08-07 日本特殊陶業株式会社 セラミツクの接合方法
JPS59232693A (ja) * 1983-06-17 1984-12-27 Ngk Spark Plug Co Ltd セラミツクと金属等との接合用クラツドろう材及びこれを用いたセラミツクと金属等との複合体
JPS6065773A (ja) * 1983-09-16 1985-04-15 株式会社荏原製作所 窒化物系セラミツクスを接合してなる金属製品並びにその製造方法
US4824008A (en) * 1986-09-16 1989-04-25 Lanxide Technology Company, Lp Surface bonding of ceramic bodies

Also Published As

Publication number Publication date
US5125557A (en) 1992-06-30
JPS6077178A (ja) 1985-05-01
DE3485434D1 (de) 1992-02-20
EP0142673A1 (en) 1985-05-29
EP0142673B1 (en) 1992-01-08

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